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Hall Effect, Impedance Spectroscopy,
2pt & 4pt Conductivity,
Capacitance-Voltage, Gas
Delivery Systems
Several systems are available for testing of chemical
gas sensors and liquid phase chem/biosensors. These
include a computer-controlled gas delivery system which
can mix and deliver pulses of test gases of varying
composition and concentration to sensor test cells
and computer controlled sensor measurement systems
which control the sensor operating temperature while
recording conductivity, impedance, or capacitance responses
to gas exposures.
Microwave
test equipment is available for use in characterizing
and monitoring acoustic wave devices and sensors including:
a variable temperature device/wafer microwave probe
station, network analyzer, vector voltmeter, signal
generators, frequency counters, pulse generators, electrometers,
RF amplifiers, and 100 MHz oscilloscopes
A Hall probe analysis station permits in-situ 4-point
conductivity and carrier mobility characterization
of films under controlled gas exposure from ultra-high
vacuum to atmospheric pressure. This instrument provides
unique and valuable information about the conductivity,
mobility, and carrier concentration of semiconducting
films during gas exposure. This Hall probe station
is part of the Thin Film Synthesis and Characterization
Facility.
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