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 Over
the last two decades, LASST has developed a well-equipped
facility for synthesis, characterization,
and processing of surfaces, interfaces, thin films,
sensors, microelectronic devices, and microsystems.
All
instrumentation, support facilities, offices and administrative
areas are housed in the Engineering
Science Research Building attached to Barrows
Hall. Several instruments are state-of-the-art
research apparatus with unique capabilities; others
allow more routine investigation using modern but well-established
techniques. The facilities available include:
 Thin
Film Synthesis and Processing
E-Beam Evaporation, Magnetron
Sputtering, Electron Cyclotron Resonance Plasma,
Effusion Cell Evaporation, Ion Assisted Deposition,
Chemical Vapor Deposition, Sol-Gel Synthesis, Atomic
Layer Deposition
- Electron
Spectroscopies
X-ray Photoelectron
(XPS), Ultraviolet Photoelectron (UPS), Auger Electron
(AES), High Resolution Electron Energy Loss (HREELS)
- Surface
Microscopies
Scanning
Tunneling (STM), Atomic Force (AFM), Field Ion (FIM),
Optical Fluorescence
- Nanomechanics
and Tribology
Nanotribometer,
Hysitron Picoindenter, Surface Profilometer, Pin-on-Disk
 Gas
Adsorption/Desorption Analysis
Molecular Beam
Dosers, Calibrated Thermal Desorption Spectrometry,
Gas Chromatograph/Mass Spectrometer (GCMS)
- Fabrication
of Sensors and Microelectronic Devices
Class 1000
Clean Room, Photolithography, Chemical Wet Processing,
Deep Reactive Ion Etcher, Wafer Dicing Saw, Device
Bonding / Packaging
- Sensor
Testing and Electronic Characterization
Hall
Effect, Impedance Spectroscopy, 2pt & 4pt
Conductivity, Capacitance-Voltage, Gas Delivery
Systems
- MicroInstruments & Systems
Laboratory
Dry Etch, Thin Film Deposition, Wet Processing,
Chemical Vapor Deposition, Photomask Generator,
Photolithography, MEMS Testing Laboratory
 Molecular and Biochemical Analysis
Fluorescence imaging, microphotometry, mass spectrometry,
biosensor devices
- Theoretical
Modeling
Surface
and Interface Processes, Surface Phase Transitions,
Devices / Instrumentation Design
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