Microfabricated Linear Electromagnetic Motor:
As part of the development of a micro Fourier Transform Spectrometer, a micro linear
translational actuator has been demonstrated. Fabricated with KOH etching of
silicon, wafer bonding, gold electroplating, and patternable polyimide, the
actuator can provide long range mirror tranlation at a constant velocity.
The permanent magnet mounted on the dovetail slider is controlled by electrical
coils patterend on the backside of the dovetail structures. Feedback is obtained
using a laser reflecting off the mounted mirror to a position sensitive diode.
This work has been published at Transducers 99. Links to both the conference
paper and presentation are included below.
Published at Transducers 99, Sendai, Japan
Diagram of a typical Fourier transform spectrometer with Michelson interferometer design. As the mirror moves a monochromatic light source will experience a cyclic intensity distribution at the detector due to interference.
Typical interferogram for a broadband optical source. At the zero path difference (ZPD) all wavelengths are in phase and a centerburst occurs. As the mirror moves past the ZPD, the different wavelengths destructive
Actual interferograms and Fourier Transformed spectra for a 650nm interference filter. (A). shows the interferogram and Fourier Transformed spectrum obtained for the micromachined FTS. For comparison, (B). shows the interferogram and spectrum for the same filter obtained from a commercial FTS (Brucker).
The Micro Instruments & Systems Laboratory
part of the Laboratory for Surface Science & Technology
A Member of the University of Maine System
