To augment the development of MicroInstrumentation, several program exist to study and develop materials and microfabrication processes critical to microfabrication such as:
- Low temperature wafer-to-wafer bonding.
- Etch stop processes.
- Characterization of anisotropic etching.
- Porous Silicon and Applications to Micromachining.
- Mechanisms of drift of silicon nitride gate ISFETS.
The Micro Instruments & Systems Laboratory
part of the Laboratory for Surface Science & Technology
A Member of the University of Maine System
