Containing, directing and sampling the flow of fluid samples is critical to realizing microinstruments for biological and chemical analysis. To date, micro fluidic components, e.g. valves, pumps and channels, have been microfabricated, but rarely are they found integrated into the same substrate. Reversible interconnections between components facilitates the assembly of modular, hybrid systems. This problem is being addressed at MISL by means of special MicroJoints to create reversible connections between tubing and microchannels within silicon and/or glass substrates and to bridge from microchannels within one substrate to another. One such MicroJoint which has proven extremely important is the finger MicroJoint shown in the photograph. In this application mating grooves are micromachined in the two substrates and then "press" fit together to form a reversible, modular, connection between different planar substrates or microcomponents. To seal liquids against leakage, photopatternable polymer gaskets are provided along with micromachined vias and channels to direct fluid flow across/between the mating substrates.
The Micro Instruments & Systems Laboratory
part of the Laboratory for Surface Science & Technology
A Member of the University of Maine System
